Magnetic Controlling Sputtering Plate Glass Film Production Line

Place of Origin:China Beijing

Company Info

Company Published: 2008
Online Postings: Products , Selling Leads
Country/Territory: China
Business Type: Trading Company, Business Service (Transportation, finance, travel, Ads, etc)
Number of Employees: 11 - 50 People

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Detailed Product Description

Glass film production linecoat various films on flat glasses. It includes cleaning, drying, vacuum processing and repeated coating etc.

Parameter

Substrate size				1.6m×2.4m×thickness3-12mm
Production period				3.5min/piecelying on film
Flat target		Surface of target		240mm×2000mm
		Quantity		4 sets
		Material		Various metal & alloy
Sputtering power			Topmost voltage	DC 600V,750V, 900V
			Topmost current	DC 100A
			Soft startup automatic constant power	1 set/target
Ultimate pressure of chamber// and buffer chamber/				6.7×10^-3Pa 5×10^-5Torr
Ultimate pressure inlet/outletchamber				5×10^-1Pa 3.75×10^-3Torr
Pumping speed of inlet/outlet chamber				From 1×10⁵Pa to 2Pa≤2.5min
From vacuum state to 1×10⁵Pa				≤2min
Ion bombarding power				DC,10kw,3A
Sputtering control	Reaction sputtering			Ar
	Automatic constant controller			0.5-2Pa
Mass flow controller				20-200SCCM
Quantity				3 sets
Non-reactivity sputtering				Ar
Automatic constant controller				0.5-2Pa
Quantity				3 sets
Optical monitor				Permeating rate of visible light gauge 4sets
Cooling water				The water must be clean and be without magnetic particle and electric medium.
Water temperature				≤25
pressure				200KPa
Flux				24 T/Hr
Cleaning water				The water must be clean
Flux				About 3-6 T/Hr
Ion-free water flux				1-2 T/Hr
Compressed gas				Be processed by filtering, regulating and oil-fog, cubage of gas storage1m³pressure500-700KPa
Total power				AC 380V,50Hz,650kva
Occupying area				10m×32m not includes accessorial area