General Multi-chamber Magnetron Sputtering Coating Machine

Place of Origin:China Beijing

Company Info

Company Published: 2008
Online Postings: Products , Selling Leads
Country/Territory: China
Business Type: Trading Company, Business Service (Transportation, finance, travel, Ads, etc)
Number of Employees: 11 - 50 People

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Detailed Product Description

General Multi-chamber Magnetron Sputtering Coating Machine

Sever & workstation modular structure design for complex coating research experiment and complex coating production.

4 chambers by serve transmitting
3 way gas source
Per-workstation chamber has 2 ways Mass Flow Meter
1 way Expansion Port for Service Position
workpiece transfer by automatic robot
Blocking design, diverse process by diverse blocking controller
Automatic PLC controller or manul controlling process and operating by touch screen

Vacuum chamber size	Server chamber	φ700×139mm
	Workstation chamber	φ290×145.5mm
	Loading chamber	Φ250×104mm
Workstation chamber quantity		4
Server position of server chamber		6
Vacuum system	Server chamber	F150 VD401
	Workstation chamber	F100 GLD201
	Loading chamber	GLD201
Ultimate pressure	Server chamber	1×10^-3Pa
	Workstation chamber	1×10^-4Pa
	Loading chamber	1×10^-1Pa
Substrate	Maximum diameter	φ200×2mm
	Maximum weight	200g
	Maximum loading capacity	4
Cathode diameter		φ200
Cathode power		DC 8kw
Athode quantity		Per-workstation chamber