Chemical Vapor Deposition Coating Machine
| Place of Origin:China Beijing |
Online Postings: Products , Selling Leads
Country/Territory: China
Business Type: Trading Company, Business Service (Transportation, finance, travel, Ads, etc)
Number of Employees: 11 - 50 People
Chemical vapor deposition coating machine for researching & manufacturing silicon solar cell
l Fully automatic computer control
l 2 way PLC controllers
l Continuous coating variety CVD films in vacuum environment
Parameter
Vacuum chamber size |
| |
Server chamber | φ760mm×270mm | |
Workstation chamber |
| |
| PECVD | φ250×250×300mm |
| VHFCVD | φ510×250×300mm |
| HWCVD | φ550×250×300mm |
Loading chamber | 250×286×300mm | |
Ultimate pressure |
| |
| Server chamber | 5×10-4Pa |
| Workstation chamber | 5×10-5Pa |
| Loading chamber | 5×10-1Pa |
Substrate |
| |
| Maximum diameter | φ150×150mm |
| Maximum weight | 2kg |
| Maximum loading capacity | 4 |
MFC | 16 ways | |
Gas source | 11ways (N2,Ar,SiH4,H2,NH3,NOX,TMB B2H6,CH4 CO2,,ETC.) | |
Chemical Vapor Deposition Coating Machine
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Contact Us
Beijing JDK Electric Equipment Business Center
[China]
Street Address : guangshun north street
City : beijing
Province/State : Beijing
Country/Region : China
